Development of screw vacuum pump
Screw vacuum pump is a kind of non-contact dry-type pump, which is an ideal kind of pump in the early 1990s. The core component is a pair of screw rotors with meshing clearance. There is no contact between metal and metal in the pump cavity, and the components in the air extraction cavity have no friction. The structure is simple and compact, and there are few vulnerable parts. It has the advantages of high vacuum, long service life, low energy consumption, no oil pollution, and small use site Point.
One lead of the screw vacuum pump is equivalent to the first stage pump, and the screw vacuum pump with multiple leads is equivalent to the multi-stage pump in series. Compared with the dry vacuum pump with multi-stage series connection such as claw vacuum pump and multi-stage Roots vacuum pump, the screw vacuum pump directly pushes the gas from the suction side to the exhaust side because there is no internal channel between the pumps at all levels, so the condensable gas, dust and The gas of particles is not easy to block and easy to clean. The single screw vacuum pump can realize the working range from 105Pa to 0.1pA. It has strong exhaust capacity, operates in dry mode, and is environmentally friendly. It is widely used in electronic, photovoltaic, pharmaceutical and chemical industries. The semiconductor industry is one of the most widely used screw vacuum pump industries.
In polysilicon preparation, semiconductor etching and other processes, corrosive gas and abrasive particles are often used or generated. In addition to the process that some products of semiconductors need particles, it is generally not expected that particles are mixed into the pump oil, but that the dry screw vacuum pump can meet the requirements except that particles are discharged from the pump. In the field of petroleum, chemical industry and biopharmaceutical industry, because there is no oil or water in the pump cavity, the dry screw vacuum pump is generally used as the pre-stage pump of the oil-free cleaning vacuum system to prevent oil pollution. Compared with the traditional processing technology, the vacuum degree is higher, the clean vacuum can be obtained, and the recovery of the intermediate volume agent can be realized, which has incomparable advantages in oil gas, solvent recovery and other aspects Potential. In the fields of electronics, vacuum coating, aviation, nuclear industry and so on, screw vacuum pump can pump out common air, inflammable and explosive gases, corrosive gases, especially to meet the requirements of high clean vacuum environment. In textile, metallurgy and other industries, the dry screw vacuum pump is more efficient and energy-saving than other types of vacuum pump in the process of vacuum defoaming and vacuum blowing decarburization (VOD) related to spandex, aramid, fiber and metallurgy.